A Normally Closed Electrostatic Parylene Microvalve for Micro Total Analysis Systems
| dc.contributor.author | Arikan, M. A. Sahir | |
| dc.contributor.author | Kulah, Haluk | |
| dc.contributor.author | Yildirim, Ender | |
| dc.date.accessioned | 2017-06-09T12:13:24Z | |
| dc.date.accessioned | 2025-09-18T13:26:02Z | |
| dc.date.available | 2017-06-09T12:13:24Z | |
| dc.date.available | 2025-09-18T13:26:02Z | |
| dc.date.issued | 2012 | |
| dc.description | Yildirim, Ender/0000-0002-7969-2243; Kulah, Haluk/0000-0003-1331-4474 | en_US |
| dc.description.abstract | This paper presents an electrostatically actuated, normally closed microvalve for parylene microfluidics. The proposed valve structure isolates the fluid from the electric field, and hence results in relatively low actuation potentials (<60 V) irrespective of the working fluid. Hereby, the microvalve solves electrolysis or electrode shielding problems observed in electrostatic actuation in micro total analysis systems. To investigate leakage properties, microvalves were tested under pressurized flow with de-ionized (DI) water. No detectable leakage ratio was observed up to 20 kPa inlet pressure, due to the unique semicircular valve seat design. It was shown that the valve seat could be reconfigured to enable sealing at various pressure levels for different applications. (C) 2012 Elsevier B.V. All rights reserved. | en_US |
| dc.description.sponsorship | Scientific and Technological Research Council of Turkey (TUBITAK) [111E110] | en_US |
| dc.description.sponsorship | This work was partially supported by The Scientific and Technological Research Council of Turkey (TUBITAK) under Grant Number 111E110. | en_US |
| dc.identifier.citation | Eıldırım, E., Arıkan, M.A.S., Külah, H. (2012). A normally closed electrostatic parylene microvalve for micro total analysis systems. Sensors And Actuators A-Physical, 181, 81-86. http://dx.doi.org/10.1016/j.sna.2012.05.008 | en_US |
| dc.identifier.doi | 10.1016/j.sna.2012.05.008 | |
| dc.identifier.issn | 0924-4247 | |
| dc.identifier.scopus | 2-s2.0-84862006274 | |
| dc.identifier.uri | https://doi.org/10.1016/j.sna.2012.05.008 | |
| dc.identifier.uri | https://hdl.handle.net/20.500.12416/12487 | |
| dc.language.iso | en | en_US |
| dc.publisher | Elsevier Science Sa | en_US |
| dc.relation.ispartof | Sensors and Actuators A: Physical | |
| dc.rights | info:eu-repo/semantics/closedAccess | en_US |
| dc.subject | Microvalve | en_US |
| dc.subject | Parylene | en_US |
| dc.subject | Electrostatic | en_US |
| dc.subject | Micro Total Analysis Systems | en_US |
| dc.title | A Normally Closed Electrostatic Parylene Microvalve for Micro Total Analysis Systems | en_US |
| dc.title | A normally closed electrostatic parylene microvalve for micro total analysis systems | tr_TR |
| dc.type | Article | en_US |
| dspace.entity.type | Publication | |
| gdc.author.id | Yildirim, Ender/0000-0002-7969-2243 | |
| gdc.author.id | Kulah, Haluk/0000-0003-1331-4474 | |
| gdc.author.scopusid | 36165070100 | |
| gdc.author.scopusid | 7004588941 | |
| gdc.author.scopusid | 6602231834 | |
| gdc.author.wosid | Arikan, M. A. Sahir/Aaz-6632-2021 | |
| gdc.author.wosid | Yıldırım, Ender/K-3962-2019 | |
| gdc.author.wosid | Külah, Haluk/Aan-2377-2021 | |
| gdc.author.yokid | 120121 | |
| gdc.bip.impulseclass | C4 | |
| gdc.bip.influenceclass | C4 | |
| gdc.bip.popularityclass | C4 | |
| gdc.coar.access | metadata only access | |
| gdc.coar.type | text::journal::journal article | |
| gdc.collaboration.industrial | false | |
| gdc.description.department | Çankaya University | en_US |
| gdc.description.departmenttemp | [Yildirim, Ender; Arikan, M. A. Sahir] Middle E Tech Univ, Dept Mech Engn, TR-06531 Ankara, Turkey; [Yildirim, Ender] Cankaya Univ, Dept Mech Engn, Ankara, Turkey; [Kulah, Haluk] Middle E Tech Univ, Dept Elect & Elect Engn, TR-06531 Ankara, Turkey; [Kulah, Haluk] METU MEMS, Res & Applicat Ctr, Ankara, Turkey | en_US |
| gdc.description.endpage | 86 | en_US |
| gdc.description.publicationcategory | Makale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanı | en_US |
| gdc.description.scopusquality | Q1 | |
| gdc.description.startpage | 81 | en_US |
| gdc.description.volume | 181 | en_US |
| gdc.description.woscitationindex | Science Citation Index Expanded | |
| gdc.description.wosquality | Q1 | |
| gdc.identifier.openalex | W2024332239 | |
| gdc.identifier.wos | WOS:000305852800012 | |
| gdc.index.type | WoS | |
| gdc.index.type | Scopus | |
| gdc.oaire.diamondjournal | false | |
| gdc.oaire.impulse | 14.0 | |
| gdc.oaire.influence | 5.104421E-9 | |
| gdc.oaire.isgreen | false | |
| gdc.oaire.popularity | 1.3401714E-8 | |
| gdc.oaire.publicfunded | false | |
| gdc.oaire.sciencefields | 02 engineering and technology | |
| gdc.oaire.sciencefields | 0210 nano-technology | |
| gdc.oaire.sciencefields | 01 natural sciences | |
| gdc.oaire.sciencefields | 0104 chemical sciences | |
| gdc.openalex.collaboration | National | |
| gdc.openalex.fwci | 3.6306 | |
| gdc.openalex.normalizedpercentile | 0.93 | |
| gdc.openalex.toppercent | TOP 10% | |
| gdc.opencitations.count | 45 | |
| gdc.plumx.crossrefcites | 23 | |
| gdc.plumx.mendeley | 71 | |
| gdc.plumx.scopuscites | 55 | |
| gdc.publishedmonth | 7 | |
| gdc.scopus.citedcount | 55 | |
| gdc.virtual.author | Yıldırım, Ender | |
| gdc.wos.citedcount | 43 | |
| relation.isAuthorOfPublication | 8f09d499-bbdb-4f2a-8fd5-9a2e648a5eac | |
| relation.isAuthorOfPublication.latestForDiscovery | 8f09d499-bbdb-4f2a-8fd5-9a2e648a5eac | |
| relation.isOrgUnitOfPublication | 0b9123e4-4136-493b-9ffd-be856af2cdb1 | |
| relation.isOrgUnitOfPublication | 43797d4e-4177-4b74-bd9b-38623b8aeefa | |
| relation.isOrgUnitOfPublication | b3982d12-14ba-4f93-ae05-1abca7e3e557 | |
| relation.isOrgUnitOfPublication.latestForDiscovery | 0b9123e4-4136-493b-9ffd-be856af2cdb1 |