Design and Modeling Interdigitated Capacitor - Spiral Inductor Resonator for Optical Pressure Sensor

Abstract

In this study, an optical pressure sensor is designed to sense a force. To achieve that, an interdigitated capacitor connected to a spiral inductor that oscillates at GHz region is proposed to be designed. To sense a force with very low amplitude, some different materials are applied as a dielectric material between the layers of the interdigitated capacitor. Thus, by applying the force, the circuit's capacitance is changed due to the displacement of the selected dielectric. This leads to change of the circuit's scattering parameters which lets to sense the lowest scale of the pressure possible. For simulation, the circuit is designed in COMSOL, theoretically studied the scattering parameters and the effect of the force on the circuit characteristic and finally, Advanced Design System is used to optimize the parameters for this specific aim. © 2021 Chamber of Turkish Electrical Engineers.